Last edited by Kira
Wednesday, July 8, 2020 | History

3 edition of Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems found in the catalog.

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

James E. Potzick

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

by James E. Potzick

  • 276 Want to read
  • 21 Currently reading

Published by U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O. in Gaithersburg, MD, Washington .
Written in English

    Subjects:
  • Microscopes -- Calibration -- Standards.,
  • Integrated circuits -- Masks -- Measurement.,
  • Chromium -- Spectra -- Standards.

  • Edition Notes

    Other titlesAntireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
    StatementJames E. Potzick.
    SeriesNIST special publication -- 260-129, Standard reference materials, NIST special publication -- 260-129., Standard reference materials
    ContributionsNational Institute of Standards and Technology (U.S.)
    The Physical Object
    FormatMicroform
    Paginationxiii, 23 p.
    Number of Pages23
    ID Numbers
    Open LibraryOL22389277M


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Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems by James E. Potzick Download PDF EPUB FB2